H D P '04
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June 30-July 3,2004 Shanghai University, Shanghai, China

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Invited Talk 5: Diamond Film/Alumina Composites Used as the Packaging Material in Integrated Circuits with Ultra-High Speed and High Power 

Speaker: Yiben Xia, Linjun Wang, School of Materials Science and Engineering, Shanghai University, Shanghai 20180, Email: ybxia@mail.shu.edu.cn.  Tel: 86-21-69982439 

Abstract: We report the properties of the diamond film/alumina composites that were thought of as promising substrate materials for integrated circuits with ultra-high speed and high power. The compressive stress in diamond films formed by hot filament chemical vapour deposition is reduced by implantation of carbon ions into alumina substrates before the deposition of diamond films. It is found that the stress in the diamond films decreases linearly with the increment of the C+ implantation dose. The measurement results of dielectric properties of diamond film/alumina composites show that the coating of CVD diamond films could effectively reduce the dielectric constant of the composite. The carbon ions implantation into alumina substrates prior to the diamond deposition can reduce the dielectric loss of the composite from 5¡Á10-3 to 2¡Á10-3, and can make the composite have better frequency stability. The thermal conductivity of composites could be obviously increased by coating CVD diamond film. The composite has a dielectric constant of 6.5 and a thermal conductivity of 3.98W/(cm¡ÁK) when the thickness of diamond film is up to 100mm. 

Biography of Speaker:

Xia Yi-Ben, a Professor and Doctorate Supervisor, is devoting himself to Microelectronic Materials & Devices, mainly involving Functional Thin Film Materials, Diamond Films & Related Devices.

 He was graduated from Fudan University majoring semiconductor physics in 1965, and got the master degree majoring infrared semiconductor from Chinese Academy of Sciences in 1981. He was a visiting scholar to pursue advanced studies in Physics Department, Universitaet Wurzburg / Germany over two years (1985-1987), Guest Professor in Fraunhofer Thin Films and Surface Engineering Institute (Fhg-IST) /Germany (1996-1987) and a Guest Professor in Materials Science Institute, Tohoku University/Japan (1998-1999).

 Now he is the Dean of School of Materials Science & Engineering in Shanghai University, the Memberships of Chinese Electronics Society, Chinese Optical Materials Society and Shanghai Semiconductor Materials Society. Now the projects undertook are Infrared properties and interfaces research of DLC ( Shanghai Natural Science Foundation), Selected growth (development) at cell places by DPLF (a key project of Shanghai Education Science Committee) and High-resolution X-ray imaging ¡ª study of the micro strip gas chamber (National Natural Science Foundation of China).

Invited Talk 6: Embedded Passives in Organic Substrate for RF Module and Assembly Characterization

Speaker: Li Li, Semiconductor Products Sector, Motorola, Inc.,2100 E. Elliot Rd., MD: EL725, Tempe, AZ 85284, USA. L.Li@motorola.com, Tel: 480-413-6653

Outline of Speech:

More functionality are being integrated in RF modules for both mobile phone and other wireless applications. For example, a RF front-end power amplifier (PA) module of GSM/GPRS mobile phone could have multiple transmit-side power amplifier die, with integrated inter-stage and output matching circuitries, couplers, power level detector and control, filter, and transmit/receive switches, and various surface mount (SMT) passive components to support functions. A BluetoothTM RF front-end transceiver module comprises the RF transceiver die, its external matching components, switches, filters, and other components to fulfill the complete RF radio function, which can be used for short-range communications in cellular phones, PDAs, and computer network applications. These RF PA modules are typically assembled in array panels, and over molded in panel form, and then singulated to individual modules.Both LTCC (Low Temperature Co-fired Ceramic) and organic substrate can be used for RF modules, driven by module cost and size reductions. The paper will focus on embedding passives in organic substrate, which is in general more cost effective. A band pass filter (BPF), balun, matching network, and decoupling caps were embedded successfully in the organic substrate, which dramatically reduced module size and cost, and resulted in competitive size modules, compared to LTCC, with less cost.

Characterization of module assembly and packaging material impact on RF performance of the PA module is important to optimize the design and maximize electrical performance. The paper will review the studies on the impact of transfer molding material on PA module performance. Critical areas on the module to cause output power (Pout) degradation were identified, which serves as a guidance for design compensation to minimize molding effects. Three areas of study were conducted, focusing on dielectric property characterization of various transfer molding compounds; EM simulation on output matching circuits with and without molding, and selective glob top experiments on various parts of the module.

Biography of Speaker:

Li Li is currently a Distinguished Member of Technical Staff at Motorola¡¯s Semiconductor Products Sector in Tempe, AZ. She received a Ph.D. in electrical engineering from the State University of New York at Binghamton, in 1995. She has worked on various areas of packaging material and process development, including flip chip interconnect and chip scale package development, Sn-Pb and Pb-free solder wafer bumping, and anisotropically electrically conductive adhesive interconnects. She is currently working on RF module development, component models for design libraries to facilitate effective RF module design flows, embedded passive filter and matching network design and simulation, integrated passives design and simulation on SiGe substrate and organic substrate, and flip chip introduction in RF modules.

Li Li has published more than 35 technical papers in the electronic packaging area. She has three issued US patents and two pending. She has more than 15 internal Motorola publications, and received three Best Paper Awards at Motorola¡¯s internal conferences. She is a senior member of IEEE Society and a member of the CPMT Board of Governors. She was awarded the IEEE CMPT Society¡¯s ¡°Outstanding Young Engineer Award¡± for the year 2002 (co-winner). She won the first Motorola-IEEE CPMT Society Graduate Fellowship Award for Research on Electronic Packaging in 1993.

Invited Talk 7£ºMaterials and Processes Issues in Fine Pitch Eutectic Solder Flip Chip Interconnection  

Speaker: C. Liu, M.W. Hendriksen*, D.A. Hutt, P.P. Conway, and D.C. Whalley, Wolfson School of Mechanical and Manufacturing Engineering Loughborough University, Loughborough, Leics, LE11 3TU, UK; *Manufacturing Technology Group, Celestica Limited, West Avenue, Kidsgrove, Stoke-on-Trent, Staffordshire, ST7 1TL, UK 

Abstract: New product designs within the electronics packaging industry continue to demand interconnects at microscopic geometry, both at the Integrated Circuit (IC) and supporting board level, thereby creating numerous manufacturing challenges. Flip Chip On Board (FCOB) applications are currently being driven by competitive manufacturing costs and the need for higher volume and robust production capabilities. One of today¡¯s low cost FCOB solutions has emerged as an extension of the existing infrastructure for Surface Mount Technology (SMT) and combines an Under Bump Metallisation (UBM) with a stencil printing solder bumping process, to generate mechanically robust joint structures with low electrical resistance between chip and board. Although electroless Ni plating of the UBM, and stencil printing for solder paste deposition, have been widely used in commercial industrial applications, there still exists a number of technical issues related to these materials and processes as the joint geometry is further reduced.  This paper reports on trials with electroless Ni plating and stencil paste printing and the correlation between process variables in the formation of bumps and the shear strength of such bumps at different geometries. The effect of precise control of the tolerances of squeegees, stencils and wafer fixtures was examined to enable the optimisation of the materials, processes and tooling for reduction of bumping defects. 

Short Biography of Speaker:

Dr. Changqing Liu received his BEng in Materials Science and Engineering from Nanjing University of Science and Technology in 1985, and an MSc in Wear Corrosion and Protection of Metals from the Institute of Metal Research (IMR) of Chinese Academy of Science in 1988. After five years of assistant professorship with IMR, he was awarded an Overseas Research Scholarship (ORS) for his doctoral research in 1993 and received his PhD degree in Engineering Design and Manufacture from Hull University, UK. He then started his Postdoctoral Research in the Interdisciplinary Research Centre (IRC) in Materials of Birmingham University from 1997. Since 2000 he joined the Wolfson School of Mechanical and Manufacturing Engineering of Loughborough University as a Research Fellow. He is a Chartered Engineer of Engineering Council, UK; and a member of Institute of Electrical and Electronics Engineers, Inc. (IEEE), CPMT Society, USA; Institute of Materials, Mineral and Mining (IMMM), UK; Institute of Nanotechnology (IoN), UK; Institute of Circuit Technology (ICT), UK.

Dr. Liu¡¯s research is primarily in the area of materials and manufacturing processes, with particular reference to materials characterisation and innovative fabrication technologies. He has been involved in a number of projects concerned with the microstructure and mechanical, electrochemical and tribological performance of advanced materials and coatings. Since 2000, his research is centred on the fine-structure-featured micro-joining technologies to enable the cost effective, environmentally friendly electronics interconnection with an emphasis of increasingly diminished joint geometry.  His current research focuses on the materials behaviour in micro-joining in connection with fabrication technologies, microstructural characteristics and mechanical integrity of Pb free micro-joints at micro and nano scale. Dr. Liu has published over 60 refereed papers including over 30 publications in the peer-reviewed academic journals. He with his co-authors has won a best paper award in Session 203 at the 28th IEMT (SEMI, IEEE), San Jose (USA) in July 2003, and the Cookson Electronics Paper Award at the 5th EMAP (IEEE/CPMT), Singapore in November 2003.

Invited Talk 8: Microstructure Evolution and Shear Strength of Eutectic Sn-9Zn and Sn-0.7Cu Lead-Free BGA Solder Balls


Speaker: C.M.L. Wu and C.M.T. Law, Department of Physics and Materials Science, City University of Hong Kong, Hong Kong SAR. e-mail: Lawrence.Wu@cityu.edu.hk


Outline of Speech:
Flip-chip and ball grid array (BGA) solder interconnections have become important technologies in the microelectronic packaging industry. In some BGA packages, solder balls of about 0.76 mm in size are used to form solder joints between the metallization pads of the BGA and the printed circuit board (PCB) for electrical connection. To enhance good physical connection between solder ball and the die, under bump metallization (UBM) is usually constructed to receive the solder balls. The UBM usually has a multilayer structure, e.g. Au/Ni/Cu layer. The Au and Ni layers, with thickness of about 0.1-1µm and 5-10µm thick respectively, can be deposited on Cu by electroplating. The thin Au layer serves as the wetting layer for soldering and for oxidation protection to the underlying layer. The thick Ni layer acts as an efficient barrier layer to prevent rapid reaction between the molten solder and the Cu layer. The Cu layer is part of the electrical circuit in the BGA package substrate. In view of the development of lead (Pb)-free solders, their long-term reliability when used in electronic products is of utmost concern. Most Pb-free solders are Sn-based and with higher melting point than that of eutectic Sn-Pb of 183oC. This simply means that Pb-free solders are reflowed at higher temperatures than that of Sn-Pb, leading to faster growth of intermetallic compounds (IMCs) at the interface between the solder balls and the UBM of the BGA. The formation of the IMCs at the interface is required to provide solder joint strength [3-6]. However, as the IMC is brittle, if the IMC layer (IML) is excessively thick, then it will have an adverse effect on the strength of a solder joint, and may result in early failure of the BGA package.


The eutectic Sn-9Zn solder alloy has been regarded as a possible substitute for eutectic Sn-37Pb alloy because its eutectic temperature (199oC) is very close to that of the eutectic Sn-37Pb. The eutectic Sn-0.7Cu solder alloy is cheap and possesses good solderability, strength and creep properties.


To demonstrate their feasibility to be used as BGA solder bumps, Sn-9Zn and Sn-0.7Cu solder balls are attached on the UBMs of a BGA substrate, so that the interfacial microstructure evolution can be studied. Also, the thermal reliability of the Pb-free BGA solder bump is demonstrated by thermal aging at 150oC for up to 1000 hr.


In the as-reflowed Sn-9Zn solder bump, its bulk microstructure mainly contains the ¦Â-Sn matrix, and scattered with Zn-rich and AuSn4 compounds. Au-Zn intermetallic compounds (IMCs) were found near the solder/UBM interface, at which a Ni-Zn-Sn ternary IMC layer of about 1¦Ìm thick was detected. Upon aging at 150oC, NiZn3 ¦Ã phase and Au-Zn IMCs were formed quite close to the Ni-Zn-Sn IML. Further aging provided a NiZn3 layer on top of the original Ni-Zn-Sn IML. The Zn content in the Ni-Zn-Sn ternary layer increased with aging time.


The as-reflowed bulk microstructure of the Sn-Cu solder bump has Cu6Sn5 and AuSn4 segregated along the ¦Â-Sn boundary. At the interface, Cu-Sn-Ni ternary intermetallic layer was formed. After aging, AuSn4 was coarsened, and the Cu-Sn-Au phase was detected in the bulk solder and at the interface. The Cu-Sn-Ni layer at the interface was thickened due to aging.


The shear strength of the two types of Pb-free BGA bumps were found to be higher than that of Sn-37Pb.


Biography of Speaker:
Dr Lawrence Wu graduated from the University of Bristol, U.K. in Aeronautical Engineering with First Class Honours. He also obtained his PhD from the same university. He has been working at City University of Hong Kong (CityU) since 1987. He is currently an Associate Professor at the Department of Physics and Materials Science. He is also the Deputy Director of the Centre for Electronic Packaging and Assemblies, Failure Analysis and Reliability Engineering at CityU.
Dr Wu has been conducting research on lead-containing and lead-free alloys for a number of years, in particular on surface mount solder joint strength, lead-free solder development, and the formation and analysis of lead-free solders doped with rare earth elements.


Apart from lecturing on the courses of ¡°electronic packaging and materials¡± and ¡°failure analysis and cases studies¡± at senior undergraduate and postgraduate levels at CityU, he is also active in conducting failure investigation/analysis and materials characterization related to industries.

 

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